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多光谱ZnS是一种综合性能优异的红外光学材料,在长波红外及多波段红外探测成像系统中被广泛应用。化学气相沉积和热等静压后处理是制备多光谱ZnS材料的关键技术。介绍了化学气相沉积工艺和热等静压处理工艺制备多光谱ZnS的工艺原理及沉积大口径头罩的结构设计;报道了研制成功的270mm大口径多光谱ZnS头罩。经测试分析,头罩的全波段透过率均已接近理论水平、吸收系数≤0.01cm-1、折射指数均匀性达到2.2×10-5、硬度160kg/mm2、抗弯强度70MPa、断裂韧性1.0MPa·m1/2。与美国Rohm&Haas公司的多光谱ZnS产品相比,该头罩的主要性能指标与其处于同一水平。
Multispectral ZnS is a versatile infrared optical material that is widely used in long-wave infrared and multi-band infrared detection imaging systems. Chemical vapor deposition and hot isostatic pressing are the key technologies for preparing multi-spectral ZnS materials. The process principle of preparing multi-spectral ZnS by chemical vapor deposition process and hot isostatic pressing process, and the structural design of large-diameter deposition of a head cover are introduced. A 270mm large-diameter multispectral ZnS hood is successfully developed. After testing and analysis, the full-band transmittance of the hood has reached the theoretical level, the absorption coefficient ≤ 0.01cm-1, the refractive index uniformity of 2.2 × 10-5, the hardness of 160kg / mm2, the flexural strength of 70MPa, fracture toughness 1.0 MPa · m1 / 2. Compared with the multi-spectral ZnS product of Rohm & Haas company in the United States, the main performance index of the hood is at the same level.