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为得到刻蚀效果好的Ni-Cr薄膜换能元,研究了刻蚀液的配比对刻蚀时间及金属桥膜换能元参数的影响。结果表明:在硫酸高铈的量一定的情况下,当V_(高氯酸):V_水为17:100时,刻蚀效果较为理想,制作的Ni-Cr薄膜换能元桥区尺寸与设计尺寸的偏差控制在了0.9%以内,并在10V、47μF条件下能够发火。
In order to obtain the Ni-Cr thin film transducer element with good etching effect, the influence of the etching liquid ratio on the etching time and the parameters of the metal bridge membrane transducer element was studied. The results show that when the content of cerium sulfate is constant, the etching effect is good when V_ (perchloric acid): V_water is 17: 100. The size and Deviations in design size are controlled within 0.9% and can ignite at 10V, 47μF.