Super-clean and super-spherical FGH4095 superalloy powder is produced by the ceramic-free electrode induction-melt inert gas atomization (EIGA) technique. A continuous and steady-state liquid metal flow is achieved at high-frequency (350 kHz) alteating current and high electric power (100 kW). The superalloy is immersed in a high-frequency induction coil, and the liquid metal falling into a supersonic nozzle is atomized by an Ar gas of high kinetic gas energy. Numerical calculations are performed to optimize the structure parameters for the nozzle tip. The undesired oxidation reaction of alloying elements starts at 1000 ?C with the reaction originating from the active sites on the powder surfaces, leading to the formation of oxides, MexOy. The role of active sites and kinetic factors associated with the diffusion of oxygen present in the atomization gas streams are also examined. The observed results reveal that the oxidation process occurring at the surface of the produced powders gradually moves toward the core, and that there exists a clear interface between the product layer and the reactant. The present study lays a theoretical foundation for controlling the oxidation of nickel-based superalloy powders from the powder process step.