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变形镜作为自适应光学系统中的关键部件,起到校正波前误差的作用。其中横向压电效应变形镜应用较为广泛,其设计参数对系统的性能有重要影响,因此需要进行优化设计。仿真表明,减小Si镜和PZT的厚度可以提高系统最大变形量,但会降低一阶固有频率。通过正交匹配两者的厚度参数可满足系统的工作要求。夹具的材料和结构参数会影响系统的热变形特性。使用与镜片材料相同的夹具,系统的热变形最小,对高度和壁厚进行优化可以减小甚至消除系统的热变形。最后,通过电压特性仿真得到了优化后变形镜各分立电极的影响函数。
Deformable mirror as a key component in adaptive optics, play a role in correcting the wavefront error. The transverse piezoelectric effect deformable mirror is widely used, and its design parameters have an important influence on the performance of the system, so the optimization design is needed. Simulation shows that reducing the thickness of Si mirror and PZT can increase the maximum deformation of the system, but reduce the first-order natural frequency. By orthogonal matching the thickness of the two parameters to meet the system’s job requirements. Material and structural parameters of the fixture can affect the thermal deformation characteristics of the system. Using the same fixture as the lens material, the thermal distortion of the system is minimized. Optimizing the height and wall thickness can reduce or even eliminate the thermal deformation of the system. Finally, the influence function of each discrete electrode of the optimized deformable mirror was obtained through the simulation of voltage characteristics.