Nanoindentation tests on single crystal copper thin film with an AFM

来源 :Journal of Harbin Institute of Technology | 被引量 : 0次 | 上传用户：haoz8

【摘要】

：

Nanoindentation tests performed in a commercial atomic force microscope have been utilized to directly measure the elastic modulus and the hardness of single cr

【作者】

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霍德鸿梁迎春程凯董申

【机构】

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PrecisionEngineeringResearchInstitute

【出处】

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Journal of Harbin Institute of Technology

【发表日期】

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2003年4期

【关键词】

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单晶铜薄膜 AFM 纳米压痕测试真空气相沉积原子压力显微镜 nanoindentation atomic force microscope thin fil

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Nanoindentation tests performed in a commercial atomic force microscope have been utilized to directly measure the elastic modulus and the hardness of single crystal copper thin films fabricated by the vacuum vapor deposition technique. Nanoindentation te

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Nanoindentation tests on single crystal copper thin film with an AFM

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