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金属有机化学气相沉积法(MOCVD)能够在长的柔性金属基带上连续、快速、均匀沉积YBa2Cu3O7-δ(YBCO)薄膜,因而极具开发价值.MOCVD制备YBCO涂层导体的关键技术之一在于金属有机源(MO)的制备.国外化学试剂公司在以2,2,6,6-4甲基-3,5庚二酮(thd)为配体的MO源上技术较为成熟,并已实现商业化生产,但是价格昂贵,其中Ba(thd)2价格约为700元/g.另外,与Y(thd)3和Cu(thd)2相比,Ba(thd)2挥发性、稳定性差且制备困难.本文对金属有机Ba源的制备、稳定性及真空下的蒸发特性进行了研究.通过引入助配体四乙烯基戊胺,该Ba源的蒸发温度比纯的Ba(thd)2更低,稳定性更高,且成本仅为30元/g,对于降低YBCO高温超导带材的制备成本具有重要意义.采用该Ba源制备的300nm厚YBCO薄膜的Jc达到2.0MA/cm2(77K,0T),表明其具有很好的实用性.
Metalorganic chemical vapor deposition (MOCVD) has great potential for continuous, rapid and uniform deposition of YBa2Cu3O7-δ (YBCO) thin films on long flexible metal substrates. One of the key technologies in the fabrication of YBCO coated conductors by MOCVD is that metal Preparation of organic source (MO). Foreign chemical reagents company in the 2,2,6,6,4 methyl-3,5-heptanedione (thd) as a ligand MO source more mature technology, and has achieved commercial (Thd) 2 is about 700 yuan / g. In addition, Ba (thd) 2 is less volatile and less stable than Y (thd) 3 and Cu Difficult to prepare.In this paper, the preparation and stability of metal-organic Ba source and the evaporation characteristics under vacuum were studied.The evaporation temperature of Ba source was lower than that of pure Ba (thd) 2 by introducing tetrakis , The stability is higher and the cost is only 30 yuan / g, which is of great significance for reducing the preparation cost of YBCO high temperature superconducting tapes.The Jc of 300nm thick YBCO film prepared by this Ba source reaches 2.0MA / cm2 (77K, 0T), indicating that it has good practicality.