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介绍了用于高效太阳电池的几种硅基微纳结构的最新研究进展,重点介绍了几种硅基微纳结构的制备方法,如阳极腐蚀制备多孔硅、各向异性制绒以及气液固(VLS)生长纳米线等,并对各种方法的特点作了分析比较,指出了各种方法存在的问题。最后对今后研究的方向做了展望,由于太阳电池在性能提高以及产业应用方面的需求,未来用于高效太阳电池的硅基微纳结构仍是研究的热点之一。进一步提升其对太阳电池效率的优化能力将是研究的重要关注点,而其制备技术也将向着低成本、大规模及可控制的方向发展。
The latest research progress on several silicon-based micro / nano structures for high efficiency solar cells is introduced. Several methods for the preparation of Si-based micro / nano structures are introduced, such as anodically etching porous silicon, anisotropic texturing and gas-liquid solid (VLS) growth of nanowires, etc., and the characteristics of the various methods were analyzed and compared, pointing out the problems of various methods. Finally, the future direction of the research is prospected. Due to the performance improvement of solar cells and the demand of industrial applications, the future of silicon-based micro-nano structure for high efficiency solar cells is still one of the hot topics. To further enhance its ability to optimize the efficiency of solar cells will be an important research focus, and its preparation technology will be toward low-cost, large-scale and controllable direction.