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用XRD和STM研究了反应溅射沉积WOx薄膜在电致变色过程中的物相结晶性及表面形貌结果表明：着退色反应使非晶WOx薄膜向有序化方向转变，表现为薄膜非晶胞衍射特征减弱这种转化与薄膜着退色反应程度密切相关饱和着色态WOx膜层由平均晶粒尺寸为20nm的颗粒组成，且表面出现空洞疏松；而不饱和着色态WOx膜层由平均晶粒尺寸为110nm的团簇组成，表面形貌相对致密
XRD and STM were used to study the phase crystallinity and surface morphology of reactively sputtered WOx thin films during the electrochromic process. The results show that the fading reaction makes the amorphous WOx thin films change to the ordering direction, The weakening of the cell diffraction characteristics This conversion is closely related to the degree of fading reaction of the film. The saturated colored WOx film consists of particles with an average grain size of 20 nm, and the surface is loose. The unsaturated colored WOx film consists of average grains Size 110nm clusters, the surface morphology is relatively dense