测量技术与设备

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叙述了一种其长度尺寸小于成像所使用波长的微波器件的近场扫描微波显微术。这种显微镜能以两种结构工作,并可定量研究材料特性和局部电场特性。文中介绍了实验性装置,反射和接收模式,材料特性和电场成象方法。参13 Describes a near field scanning microwave microscopy of a microwave device whose length dimension is less than the wavelength used for imaging. The microscope works in two configurations and can quantitatively study material properties and local electric field properties. The article describes the experimental setup, reflection and reception modes, material properties and electric field imaging methods. Reference 13
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