论文部分内容阅读
光波导是集成光路及其元器件中的最基本构成单元,其作用类似电路中的导线,是用来实现不同器件之间的光路连接,对光波主要起着限制、传输、耦合的作用。本文主要讨论硅基光电调制器的设计及其设计优缺点,更高的调制频率、更小的插入损耗、更大的调制深度【1】是SOI电光调制器的发展方向。通过缩小波导截面尺寸和优化器件结构,可以有效提高调制频率;而改善工艺条件使侧壁光滑,能降低器件的插入损耗[2]。
Optical waveguide is integrated optical circuit and its components in the most basic unit, its role is similar to the wire in the circuit is used to achieve the optical connection between different devices, the light wave plays a major role in limiting, transmission, coupling. This article mainly discusses the design of silicon-based photoelectric modulator and its design advantages and disadvantages, higher modulation frequency, smaller insertion loss, greater modulation depth [1] is the development direction of SOI electro-optic modulator. By reducing the waveguide cross-section size and optimizing the device structure, the modulation frequency can be effectively increased; while the process conditions are improved to make the sidewall smooth, the insertion loss of the device can be reduced [2].