论文部分内容阅读
采用光学传递矩阵方法设计了紫外波段SiO_2/Si_3N_4介质膜分布式布拉格反射镜,并利用等离子体增强化学气相沉积技术在蓝宝石(0001)衬底上制备了SiO_2/Si_3N_4介质膜分布式布拉格反射镜.光反射测试表明,样品反射谱的峰值波长仅与理论模拟谱线相差10 nm,并随着反射镜周期数的增加而蓝移.由于SiO_2与Si_3N_4具有相对较大的折射率比,因而制备的周期数为13的样品反射谱的峰值反射率就已大于99%.样品反射谱的中心波长为333 nm,谱峰的半高宽为58 nm.样品截面的扫描电子显微镜和表面的原子力显微镜测量结果表明,样品反射谱的中心波长蓝移是由子层的层厚和界面粗糙度的变化引起的.X射线反射谱表明,子层界面过渡层对于反射率的影响较小,并且SiO_2膜的质量比Si_3N_4差,也是造成反射率低于理论值的原因之一.
A dielectric Bragg mirror with a dielectric layer of SiO_2 / Si_3N_4 in the ultraviolet region was designed by optical transfer matrix method. A dielectric Bragg reflector (SiO_2 / Si_3N_4) was deposited on a sapphire (0001) substrate by plasma enhanced chemical vapor deposition. The light reflection test showed that the peak wavelength of the sample’s reflection spectrum was only 10 nm different from that of the theoretical simulated spectrum and shifted blue with the increase of the number of the mirrors.4 Because of the relatively large refractive index ratio of SiO_2 and Si_3N_4, The peak reflectance of the sample reflection spectrum with a period of 13 is greater than 99%. The central wavelength of the sample reflection spectrum is 333 nm and the full width at half maximum of the spectrum peak is 58 nm. Scanning electron microscopy and surface atomic force microscopy The results show that the blue shift of the central wavelength of the reflection spectrum of the sample is caused by the variation of the layer thickness and interface roughness of the sublayer.The X-ray reflection spectrum shows that the influence of the sublayer interface transition layer on the reflectivity is small, Than Si_3N_4 poor, but also caused the reflectivity below the theoretical value of one of the reasons.