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介绍了一种微机型万工显测量系统 ,该系统应用软件细分技术提高了分辨率与测量精度 ,降低了万工显微机化的成本。应用微机进行数据处理 ,显著地提高了工作效率。
This paper introduces a kind of micro-machined measuring system which can improve the resolution and measuring precision and reduce the cost of micromanipulation. Application of computer data processing, significantly improve work efficiency.