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由实验中得到的激光损伤概率与表面杂质密度的关系出发,结合XRD测试和激光损伤测试的结果,得到体缺陷或杂质破坏起主导作用的损伤机理.将激光作用时杂质吸收的热学和力学过程与杂质分布的统计规律结合起来,得到了深埋于薄膜内部的杂质诱导薄膜损伤概率与杂质密度、激光功率密度以及薄膜厚度的关系.该模型认为能诱导薄膜破坏的杂质尺寸范围与杂质填埋深度有关,所以不同深度处能诱导薄膜损伤的杂质密度不一样,理论结果与实验结果符合得很好.该理论模型还可以很好地解释损伤形貌.
Based on the relationship between the probability of laser damage and the surface impurity density obtained from the experiment, the damage mechanism leading to body defects or impurity destruction is obtained by combining the results of XRD and laser damage testing.The thermal and mechanical processes of impurity absorption during laser irradiation Combined with the statistical rule of impurity distribution, the relationship between impurity probability, laser power density and film thickness of impurity-induced thin films buried deeply in the film is obtained.The model considers that the range of impurity sizes that can induce the film damage and the amount of impurities Therefore, the density of impurities that can induce film damage at different depths is different, and the theoretical results are in good agreement with the experimental results. The theoretical model can also explain the damage morphology well.