论文部分内容阅读
本文介绍了为克股液态铝源缺点而开发的陶瓷片状铝源的制备,有关性质及扩散工艺实验,并给出了初步实验结果.
This paper introduces the preparation, properties and diffusion experiments of ceramic flake aluminum source developed for the shortcoming of gram liquid aluminum source, and presents the preliminary experimental results.