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电极系统是ArF准分子激光光源的核心部件。首先通过对ArF准分子激光光源电极系统的初步设计,得到合适的放电区尺寸,提供了电极和预电离电极电压的加载方式,从而形成由阴极、阳极、预电离电极、陶瓷件和工作气体五部分组成的电极系统简化模型。然后基于该电极系统简化模型,在不同电压加载条件下进行了电场仿真。仿真结果表明,放电区域电场分布均匀对称,电极系统设计较为合理。
The electrode system is a core part of the ArF excimer laser light source. Firstly, through the preliminary design of the ArF excimer laser light source electrode system, the appropriate discharge area size is obtained, and the loading method of the electrode and the pre-ionization electrode voltage is provided so that the cathode, the anode, the pre-ionization electrode, the ceramic member and the working gas V Partially composed electrode system simplifies the model. Then, based on the simplified model of the electrode system, the electric field simulation under different voltage loading conditions was carried out. The simulation results show that the distribution of the electric field in the discharge area is symmetrical and the design of the electrode system is reasonable.