【摘 要】
：
The research project "CIS-Clustertool" has developed a new operating platform for300×300mm2 glass based substrates.The CIS-Clustertool is set up at the AVANCIS R&D pilotline in Munich,Germany to inves
【机 构】
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AVANCIS GmbH,Germany SINGULUS Technologies AG,Ger
【出 处】
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SNEC 第十届(2016)国际太阳能产业及光伏工程(上海)论坛
论文部分内容阅读
The research project "CIS-Clustertool" has developed a new operating platform for300×300mm2 glass based substrates.The CIS-Clustertool is set up at the AVANCIS R&D pilotline in Munich,Germany to investigate novel rapid thermal processing (RTP) concepts for the formation of the polycrystalline CIGSSe semiconductor.All investigated concepts are compatible to be implemented in the future large-scale mass production factories.
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