论文部分内容阅读
Improvements of Plasma Immersion Ion Implantation (PⅢ) and Deposition (PⅢD) Processing for Materials
【机 构】
:
LaboratórioAssociadodePlasma,InstitutoNacionaldePesquisasEspaciais,S.J.Campos,SPLaboratoryofTechnolo
【出 处】
:
The 11th International Workshop on Plasma-Based Ion Implanta
【发表日期】
:
2011年9期
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