采用离子辅助沉积的方法,分别以T iO2和T i3O5为初始膜料在K 9玻璃上制备了氧化钛薄膜,并研究了离子束流密度对以T i3O5为膜料制备的薄膜透射性能的影响。实验结果表明,热处理前薄膜都为无定形结构;热处理后有明显的锐钛矿结构(101)择优取向,以T i3O5为初始膜料制备的薄膜吸收优于以T iO2为膜料制备的薄膜;薄膜透射率极值随束流密度增大有临界值。 Titanium oxide films were prepared on K 9 glass using TiO 2 and Ti 3 O 5 as the starting materials by ion-assisted deposition. The effects of ion beam current density on the transmittance of films prepared by using Ti 3 O 5 . The experimental results show that the films are all amorphous before heat treatment. The preferred orientation of anatase (101) is obvious after heat treatment. The film prepared with Ti3O5 as the initial film has better absorption than the film with Ti02 as the film The critical value of film transmittance increases with the increase of beam current density.