2. 您的位置
3. 首页
4. 会议论文
5. Modeling of C3F6O/Ar Plasma Chemistry for SiO2 Etching Processes

Modeling of C3F6O/Ar Plasma Chemistry for SiO2 Etching Processes

来源 :The 8th Asian-European International Conference on Plasma Su | 被引量 : 0次 | 上传用户：jxhxf0

【作 者】

：

Yusuke Kondo Yudai Miyawaki Keigo Takeda Kenji Ishikawa Toshio Hayashi Makoto Sekine Hiroki Kondo Masaru Hori 

【机 构】

：

Nagoya University,Furo-cho,Chikusa-ku,Nagoya 464-8603,Japan

【出 处】

：

The 8th Asian-European International Conference on Plasma Su

【发表日期】

：

2011年1期

【关键词】

：

Plasma etching Modeling SiO2 

下载到本地 , 更方便阅读

下载此文 赞助VIP

声明 : 本文档内容版权归属内容提供方 , 如果您对本文有版权争议 , 可与客服联系进行内容授权或下架

论文部分内容阅读

其他文献

Syngas Production from Coal through Microwave Plasma Gasification:Influence of Steam and Coal Partic

会议

PlasmaMicrowaveCoalGasification

Plasma Flames Sustained by 915 MHz Microwaves and Burning Hydrocarbon Fuels

会议

Plasma torchMicrowave plasma915 MHzPlasma flame

Effects of Oxide Layer on the Frictional Properties on Titanium Coated Silicon Wafer Manufactured by

会议

TitaniumCoatingsPhysical Vapor Deposition (PVD)FrictionAFM

Development of a Rapid Nitriding Process by Subsidiary Post Plasma to Improve the Mechanical Propert

会议

Plasma nitridingRapid NitridingPost plasmaAutomobile partsMechanical Propert

Antibacterial Activity of Nanotubular Titania Deposited with Tetracycline Coated in Polylactic-co-gl

会议

Surface treatmentTiO2 nanotube layerAnodization

The Effect of Annealing on Hardness,Residual Stress,and Fracture Resistance Determined by Modulation

会议

Ion beam-assisted depositionMultilayerHardnessResidual stress

Effect of Surfactant Agent and PTFE Content in Plating Solution on Surface Morphology and the Micros

会议

Electroless platingNi-P-PTFE composite coatingSurface morphology and microstru

Fabrication and Optoelectronic Characteristics of UV Photodetector Based on ZnO/Nano-Diamond Heteroj

会议

Ultraviolet detectorZnO/nano-diamond heterojunctionRF reactive magnetron sputt

XPS Study of Polycrystalline Diamond Surfaces after Annealing Treatment

会议

Diamond filmChemical vapor depositionHydrogen plasma treatmentXPS

Preparation of Ni-MgO Nano-catalysts for Partial Oxidation of Methane by RF (Radio Frequency) Therma

会议

RF plasmaNi-MgOCatalystMethane reforming