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LED蓝宝石衬底晶片化学机械抛光液及其抛光性能研究
【机 构】
：
清华大学摩擦学国家重点实验室 北京 100084;深圳清华大学研究院 深圳518057 深圳清华大
【出 处】
：
第九届全国摩擦学大会
【发表日期】
：
2009年12期
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