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Indium-tin-oxide (ITO) films are widely applied as the transparent conductive layers in light emitting diodes and solar cells.In this paper,ITO nanowiskers have been obtained by controlling the oxygen flow in the process of evaporation by electron-beam evaporation technique.ITO nanowiskers appeared for specific vapor-liquid-solid (VLS) growth conditions in the process.Nanowisker ITO films were analyzed by SEM,AFM,and ultraviolet-visual spectrometer.The films exhibit rough surface morphology with excellent transparent current spreading.