A novel simple surface modification route, i.e., solution deposition planarization (SDP), was firstly applied for the enhancement of the flux pinning in superconducting thin films.Solution-derived amorphous Y2O3 films were spin-coated on LaAlO3 (LAO) substrates for sputtered YBa2Cu3O7-δ (YBCO) films.The erystallinity and self-field properties of YBCO with amorphous Y2O3 decoration were improved due to reduced roughness when the concentrations were properly chosen.The dislocation density in the YBCO thin films induced by amorphous Y2O3 was measured and calculated.The relationship between the dislocation density and power-law exponent a was systematically investigated.The surface planarization and defect-induced flux pinning behavior of amorphous Y2O3 films, indicated a promising future for cost-effective coated conductors on practical applications.