MEMS Manufacturing- The Changing Landscape

来源 :2012传感器与MEMS技术产业化国际研讨会 | 被引量 : 0次 | 上传用户：killsmagicer

【摘要】

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【作者】

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Rakesh Kumar

【机构】

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Nanyang Technological University, Singapore, respectively

【出处】

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2012传感器与MEMS技术产业化国际研讨会

【发表日期】

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2012年7期

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With increasing demand for MEMS device for consumer and mobile applications, new business opportunities have emerged for high volume manufacturing of MEMS. CMOS foundries like GLOBALFOUNDRIES, TSMC, UMC, SMIC, X-Fab, Jazz and ASMC have started MEMS activities as a value addition to their core semiconductor business. Currently MEMS manufacturing sector is dominated by IDMs. MEMS foundries are mostly involved in manufacturing of high value and low volume specialty MEMS products.

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MEMS Manufacturing- The Changing Landscape

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