论文部分内容阅读
Ternary TiAlN thin films attracted considerable industrial interest,because of their excellent tribological performance and high oxidation resistance at high temperature.Recently,TiAlSiN thin films have been developed in order to possess high hardness and good chemical stability at temperature exceeding 800 oC.These properties are very important in developing new generation superhard and wear-resistant thin films for high speed and dry machining applications.