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5. Thin film coatings on capillary inner walls by DBD plasma

Thin film coatings on capillary inner walls by DBD plasma

来源 :2011年第三届微电子及等离子体技术国际会议 | 被引量 : 0次 | 上传用户：wodelvtu

【摘 要】

：

A novel method for thin film coatings on capillary inner walls was introduced by atmospheric pressure DBD plasma.The advantage of this method is that the length of the capillary could be increased and

【作 者】

：

Di Zhao Dacheng Wang 

【机 构】

：

School of Photoelectrical Engineering, Changchun University of Science and Technology, Changchun,Jil

【出 处】

：

2011年第三届微电子及等离子体技术国际会议

【发表日期】

：

2011年9期

【关键词】

：

PE-CVD Atmospheric-pressure DBD plasma Capillary inner surface 

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A novel method for thin film coatings on capillary inner walls was introduced by atmospheric pressure DBD plasma.The advantage of this method is that the length of the capillary could be increased and shortened as actual needs.

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