【摘 要】
：
In recent years, significant interest has grown in the use of Deep Reactive Ion Etching (DRIE) technique for biomedical applications.Micro needle arrays for transdermal drug delivery/blood monitoring
【机 构】
：
SPP Process Technology System (SPTS)
【出 处】
：
第四届微米纳米技术“创新与产业化”国际研讨会暨物联网MEMS产业应用论坛
论文部分内容阅读
In recent years, significant interest has grown in the use of Deep Reactive Ion Etching (DRIE) technique for biomedical applications.Micro needle arrays for transdermal drug delivery/blood monitoring is an important building block for biomedical products, and the fabrication of such arrays in Si inherits solutions that have already been developed for commercialised MEMS devices.
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