Chemical Vapor Deposition of ZrB2 Coating and Microstructure Research

来源 :第二届中国国际复合材料科技大会 (CCCM-2) | 被引量 : 0次 | 上传用户:kangj04
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  The reaction system is ZrCl4-BCl3-H2-Ar, ZrB2 coating is prepared on the surface of the graphite substrate under low pressure.X-ray diffraction (XRD) and scanning electron microscopy (SEM) is used to researching the deposition of temperature and location which influenced on the composition phase and microstructure of ZrB2 coating.
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