LATERAL ELECTRIC FIELD EXCITED RESONATOR BASED ON PZT CERAMICS

来源 :2015两岸超声技术与医学研讨会 | 被引量 : 0次 | 上传用户:erhen
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Background, Motivation and Objective At present lateral electric field excited resonators are widely used for development of liquid and biological sensors. The main problem in development of such resonators is suppression of parasitic oscillations which strongly deteriorate their resonant properties. For solving this problem researchers use the electrodes of special shape or damping layer deposited on the certain part of resonator. By now aforementioned resonators were developed on such materials as lithium niobate, lithium tantalate, and quartz. But possibility of use of lead zirconate titanate piezoceramics (PZT) was not studied although this material has high value of electromechanical coupling coefficient. In this paper the resonators with lateral electric field based on pointed piezoceramics was first developed. It has been found that these resonators are characterized by good quality of series and parallel resonances at low-frequency range. These properties are very important for development of various acoustic sensors.
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