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Chemical compositions and bond contents in B-C-N films controlled by N2/Ar flow ratio within magnetr
【机 构】
:
School of Physics and Optoelectronic Technology, Dalian University of Technology,Dalian 116024 China
【出 处】
:
2011年材料表面与界面国际大会
【发表日期】
:
2011年9期
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