In Plasma Immersion Ion Implantation (PⅢ) a bias voltage is applied to an object immersed in a plasma,subjecting it to ion bombardment.PⅢ creates active radicals in the sub surface region of polymers.Two versions of the process are possible,one in which the polymer is modified by a plasma formed in an elemental gas such as nitrogen and another in which the polymer subjected to PⅢ is deposited from the plasma using a precursor gas,such as acetylene.Both short lived and long-lived radicals are created[1].