【摘 要】
：
Multi-sensing methodology has been realized on the Nano & Micro surface mechanics testing which can perform all common mechanical tests of nano/micro indentation,scratching,reciprocating and rotating
【机 构】
：
Center for Tribology,Campbell,CA 95008,USA
【出 处】
：
Fifth International Conference on Surface Engineering(第五届表面工
论文部分内容阅读
Multi-sensing methodology has been realized on the Nano & Micro surface mechanics testing which can perform all common mechanical tests of nano/micro indentation,scratching,reciprocating and rotating wear,adhesion and delamination,elasticity and plasticity,etc.A novel nano-analyzer can measure Youngs modulus and nano-hardness of ultra-thin films and coatings down to 1 nm thickness without a substrate effect,this new innovated instrument has function of AFM by using the same indentation tip.Some examples of scientific and industrial applications will be presented and demonstrated.
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