【摘 要】
：
In the last decades,fabrication of microlens array in materials with high-damage threshold has attracted increasing interest,especially in the application of high-power laser.In this paper,we propose
【机 构】
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Xi'an Jiaotong Univ China
【出 处】
：
2016年第二届光子学与光学工程国际会议暨第八届西部光子学会议
论文部分内容阅读
In the last decades,fabrication of microlens array in materials with high-damage threshold has attracted increasing interest,especially in the application of high-power laser.In this paper,we propose an advanced strategy to efficiently fabricate microlens array on the surface of glass using a single-pulsed femtosecond laser wet etch process,which is a combination of highspeed laser scanning and the subsequent chemical etch with HF solution.Based on this method,double-sided microlens array,nonregular arrays consisting of close-packed concave microlens array on one side and regular concave MLAs on the other side,were fabricated on the 1cm*1cm glass.
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