【摘 要】
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As conventional plasma sources are small enough, some distinct features of these so-called microplasma sources are desirable for applications such as gas an
【机 构】
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Jiangsu Key Lab of Thin films, Department of Physics, Suzhou University, Suzhou 215006, China
【出 处】
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9th Asia-Pacific Conference on Plasma Science and Technology
论文部分内容阅读
As conventional plasma sources are small enough, some distinct features of these so-called microplasma sources are desirable for applications such as gas analyzers, ion thrusters, sterilizers, plasma displays, localized etching or film deposition and so on.In this article, we have focused on the influence of driven frequency on characteristics of Ar micro-inductively coupled plasma jet under the variable parameters such as input power, gas pressure, distance from high voltage terminal etc.
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