Characteristics of micro-inductively coupled plasma jet and its application to the localized film de

来源 :9th Asia-Pacific Conference on Plasma Science and Technology | 被引量 : 0次 | 上传用户:hzduoying001
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  As conventional plasma sources are small enough, some distinct features of these so-called microplasma sources are desirable for applications such as gas analyzers, ion thrusters, sterilizers, plasma displays, localized etching or film deposition and so on.In this article, we have focused on the influence of driven frequency on characteristics of Ar micro-inductively coupled plasma jet under the variable parameters such as input power, gas pressure, distance from high voltage terminal etc.
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厉有为,1938年生,辽宁新民人。从199(1年到1998年,历任深圳市人大常委会主任、市长、市委书记。在深圳期间,厉有为亲历了两场轰动全国的大论战:1994年,针对某些学者提出的“