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NbN/AlN/NbN约瑟夫森结的制备工艺及电学特性研究
【机 构】
:
中国科学院上海微系统所,上海 200050
【出 处】
:
第十三届全国超导薄膜和超导电子器件学术研讨会
【发表日期】
:
2014年期
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