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PDMS (Polydimethylsiloxane) is the most popular materials for fabrication of bio-MEMS and micro total analysis system field.
Atmospheric-Pressure Plasma Jet from an Array of Micro Holes for PDMS Surface Modification
【摘 要】
：
PDMS (Polydimethylsiloxane) is the most popular materials for fabrication of bio-MEMS and micro total analysis system field.
【机 构】
：
Department of Electrical and Computer Engineering, Ajou University, Republic of Korea
【出 处】
：
2011年第三届微电子及等离子体技术国际会议
【发表日期】
：
2011年9期
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