A two-dimensional self-consistent fluid model coupled with the full set of Maxwell equations is established to investigate the phase shift effect on transient b
As the gate length of transistors is reaching beyond the 32 nm technology nodes,fundamental physics and material limitations,such as off-state leakage current a
Spatial and temporal behaviors of the electron energy distributions (EEDFs) and the plasma parameters were experimentally studied in inductively coupled plasma
Diamond-like carbon (DLC) films were prepared on silicon substrates by the radio frequency (RF) plasma enhanced chemical vapor deposition (PECVD) method using m