Piezoelectric Micromachined Ultrasonic Transducers with Increased Coupling Coefficient via Series Tr

来源 :2015两岸超声技术与医学研讨会 | 被引量 : 0次 | 上传用户:xxp520
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Background,Motivation and Objective This work demonstrates a new electrode configuration for piezoelectric micromachined ultrasonic transducers(PMUTs) with increased electromechanical coupling coefficient(kt 2).The electrodes,a center electrode surrounded by a ring electrode,are identical to those used in differential PMUTs.
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