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用激光激发超声兰姆波是近年提出的一种新的微传感器构成方法。本文从光－热－声波转换的基本原理出发，推导出激光在硅薄膜中激发兰姆波的条件和产生给定模式兰姆波的方法，给出了具体的实验设置、初步实验结果和数据分析。
Laser-induced ultrasonic Lamb wave is proposed in recent years, a new micro-sensor method. Based on the basic principle of photo-thermo-acoustic wave conversion, this paper deduces the condition of laser exciting Lamb wave in silicon thin film and the method of generating Lamb wave in a given mode. The experimental setup, preliminary experimental results and data analysis.