1971年,有人提出了采用离子抛光技术来解决光学表面的激光感生损坏阈的问题。这建议的根据是离子抛光在除掉表面污染和减低表面粗糙度方面应是有效的。此后不久,吉乌里亚诺(Giuliano)发表了关于离子抛光兰宝石的激光感生表面损坏阈的结果。用近切入射7千电子伏特能量的氩离子,他发现兰宝石表面离子抛光是最光滑的,但是损坏阈较高。吉乌里亚诺(Giuliano)认为损 In 1971, the issue of using ion polishing techniques to address laser-induced damage thresholds on optical surfaces was proposed. The rationale behind this suggestion is that ion polishing should be effective in removing surface contamination and reducing surface roughness. Shortly thereafter, Giuliano published the results of a laser induced surface damage threshold on ion-polished sapphire. Using argon ions that impinge at nearly 7 keV, he found that the sapphire surface was the smoothest, but the damage threshold was higher. Giuliano considers damage