本文从实验上研究了用2MeV ~4He~+背散射对从几十nm到几个μm范围内的各种固体薄膜的厚度进行精确测量的方法。并对各种测量方法和测量结果进行了详细的讨论。 In this paper, the method of accurately measuring the thickness of various solid films ranging from tens of nm to several μm with 2MeV ~ 4He ~ + backscattering has been studied experimentally. And a variety of measurement methods and measurement results were discussed in detail.