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报道了一款用于X波段的悬臂梁接触式RF MEMS串联开关的微加工工艺设计。首先,介绍了该悬臂梁接触式MEMS串联开关的基本工作原理;然后,简单描述了其结构组成和尺寸参数;最后,对掩膜版和对位标记的设计做了相应介绍。工艺方案设计包括初步工艺设计和根据实际加工条件的方案优化设计。初步工艺方案中加工步骤繁琐并需要两层牺牲层,制作难度大,难以保证较高的成品率。考虑实际加工条件的优化设计,采用聚酰亚胺作为牺牲层,使得牺牲层减少到一层。利用PECVD工艺沉积SixNy和溅射Au工艺得到了悬臂梁结构,简化了工艺流程,可提高工艺成品率。
Reported a micro-fabrication process design for X-band cantilever contact RF MEMS series switches. First of all, the basic working principle of the cantilever contact MEMS series switch is introduced. Then, the structure and size parameters of the switch are described briefly. Finally, the design of the mask and the alignment mark are introduced. Process design includes the initial process design and optimization of the program based on the actual processing conditions. In the preliminary process scheme, the processing steps are cumbersome and require two layers of sacrificial layers, which are difficult to manufacture and difficult to guarantee a high yield. Taking into account the actual processing conditions of the optimal design, the use of polyimide as sacrificial layer, making the sacrificial layer reduced to a layer. Using PECVD process to deposit SixNy and sputter Au process, a cantilever structure is obtained, which simplifies the process flow and improves the process yield.