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为了实现静电电压表的精确测量,提出了一种基于等应变梁和光纤布拉格光栅(FBG)的静电电压传感器。在一定温度范围内,由双FBG的结构方案实现了传感器的温度自补偿,通过对等应变梁的仿真分析和传感器系统的电场仿真,优化设计和制备了传感器结构系统。利用一对平板电极产生匀强电场,在静电力作用下等应变梁上的导体半球受力致使等应变梁发生变形,使得两个FBG反射光谱的中心波长产生偏移,通过FBG的波长差实现了电压的测量。实验结果表明:该传感器可实现5~24 k V直流(DC)高压和交流(AC)高压有效值的测量,5~12 k V的计算精度为2.1%,12~24 k V的计算精度为0.89%,传感曲线的拟合度为0.99985,基本满足高电压测量系统的稳定可靠、精度高、抗干扰能力强等要求。
In order to achieve accurate measurement of the electrostatic voltmeter, an electrostatic voltage sensor based on an isobaric beam and a fiber Bragg grating (FBG) is proposed. In a certain temperature range, the temperature self-compensation of the sensor is realized by the double FBG structure scheme. Through the simulation analysis of the equivalent strain beam and the electric field simulation of the sensor system, the sensor structure system is optimized and prepared. A uniform electric field is generated by a pair of flat electrodes. Under the action of electrostatic force, the deformation of the equal strain beam such as the conductor hemisphere on the strain beam causes the center wavelength of the two FBG reflection spectra to be shifted, which is achieved by the wavelength difference of the FBG The voltage measurement. The experimental results show that the sensor can measure 5 ~ 24 kV DC high voltage and AC high voltage effective value, the calculation accuracy of 5 ~ 12 k V is 2.1%, and the calculation precision of 12 ~ 24 k V is 0.89%, and the fitting curve of the sensing curve is 0.99985, which basically meets the requirements of stable and reliable high-voltage measurement system, high precision and strong anti-interference ability.