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本发明是一种光纤本征谐振子传感器,直接在光纤端面上加工微悬梁谐振子,属于光纤传感器技术领域,特征为:本发明包括激光光源、探测器、光纤定向耦合器、匹配液和传感探头。本发明实现了光纤本征结构一体化,全光测量,单一光源同时实现谐振子的激励和谐振信号的检出以及在线分布式多点监测。本发明在光纤端面和微梁构成法布里-珀罗光学谐振腔,该F-P腔的反射光信号被谐振腔调制,然后沿光纤光路返回,再由光纤耦合器输出端的光电探测器PD进行接受。本发明同时考虑到微悬梁的品质因数,来实现对狭小空间的真空度的测量。
The invention belongs to the technical field of optical fiber sensors, and is characterized in that the invention comprises a laser light source, a detector, a fiber optic directional coupler, a matching liquid and a transmission Feel the probe. The invention realizes integration of optical fiber intrinsic structure, all-light measurement, simultaneous excitation of a single light source and detection of resonance signal and on-line distributed multipoint monitoring. The invention forms a Fabry-Perot optical cavity in the fiber end face and the microbeam, and the reflected light signal of the FP cavity is modulated by the resonant cavity and then returned along the optical fiber path, and then is received by the photodetector PD at the output end of the fiber coupler . The invention simultaneously takes the quality factor of the micro-cantilever into consideration to realize the measurement of the vacuum degree of the narrow space.