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提出了一种采用传统光学全息曝光技术,在同一芯片上制作不同周期的布拉格光栅的新方法.在这个简单实用的方法中,聚酰亚胺用来保护第一次做好的某一周期的光栅.这种新方法制作工艺简单,成本低,且与传统的半导体工艺兼容.
A new method of fabricating Bragg gratings with different periods on the same chip by using traditional optical holographic exposure technology is proposed. In this simple and practical method, polyimide is used to protect a certain period This new method is simple, inexpensive and compatible with traditional semiconductor processes.