论文部分内容阅读
实验利用直流和射频磁控溅射方法交替沉积Cu-SiO2纳米复合膜,研究不同Cu靶功率和衬底温度对纳米复合膜的相结构和光吸收性能的影响。结果表明:随着Cu靶功率的增加,金属Cu纳米颗粒尺寸增大,导致光吸收峰峰位发生红移;随着衬底温度的升高,由于Cu再蒸发效应致使金属Cu纳米颗粒尺寸减小,引起光吸收峰峰位发生蓝移;与室温下沉积态Cu-SiO2纳米复合膜相比,在衬底加热条件下沉积的纳米复合膜在可见光波段出现了明显的表面等离子体共振吸收峰。因此,Cu靶功率和衬底温度对Cu-SiO2纳米复合薄膜的结晶状况和光吸收性能有显著影响。
The effects of different Cu target power and substrate temperature on the phase structure and optical absorption properties of nanocomposite films were investigated by DC and RF magnetron sputtering alternately deposited on Cu-SiO2 nanocomposite films. The results show that with the increase of Cu target power, the size of metal Cu nanoparticles increases, leading to red shift of the peak of light absorption peak. With the increase of substrate temperature, the size of metal Cu nanoparticles decreases due to Cu re-evaporation Which caused a blue shift at the peak position of light absorption. Compared with the deposited Cu-SiO2 nanocomposite film at room temperature, the nanocomposite film deposited under the substrate heating showed obvious surface plasmon resonance absorption peak in the visible light band . Therefore, the Cu target power and the substrate temperature have a significant effect on the crystallization and light absorption properties of Cu-SiO2 nanocomposite films.