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有关液态金属离子源的研究,国内已有报道。我们也开展了这方面的工作。图1是镓液态金属离子源的结构示意图。要获得稳定的离子发射,关键是在钨针尖上充分浸润镓液。钨针的电镜照片如图2所示。由图2可以估算针尖的曲率半径在2—3μm左右。针尖的清洗用电解清洗较为简便,效果也很好。挂镓时,针尖的加热可用电子轰击的方法,镓液的温度控制在700℃左右。温度过高,镓的蒸发明显增加;温度过低,对钨的浸润不好。各电极与电
The research on liquid metal ion source has been reported in China. We have also carried out this work. Figure 1 is a schematic diagram of the gallium liquid metal ion source structure. To get a stable ion emission, the key is to fully infiltrate the gallium solution on the tungsten tip. Tungsten needle electron micrographs shown in Figure 2. From Figure 2 can be estimated tip radius of curvature of about 2-3μm. Tip cleaning with electrolytic cleaning is relatively simple, the effect is also very good. Hanging gallium, the tip of the heating available electron bombardment method, gallium temperature control at about 700 ℃. The temperature is too high, gallium evaporation increased significantly; temperature is too low, the infiltration of tungsten is not good. Each electrode and electricity