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引言最近几年来,人们总企图把光纤传感器和电路集成在一块基片上,于是提出了一种SOMET元件。它的全名为“Senso-OptoMirco-Electronic Device”(敏感光微电子元件),它的基本设想是使导光元件不用玻璃,而用半导体,这样,导光元件就成为集成电路中的一个部件。 SOMET元件能使物理量(如:pH值,离子浓度,气体浓度,压力,加速度)的变化转换成光强的变化。本文将介绍下列内容:
INTRODUCTION In recent years, people always wanted to integrate optical fiber sensors and circuits on a single substrate, so a SOMET component was proposed. Its full name is “Senso-OptoMirco-Electronic Device,” its basic idea is to make the light-guide element without glass, and use semiconductors so that the light-guide element becomes a part of the integrated circuit . SOMET components can be physical quantities (such as: pH, ion concentration, gas concentration, pressure, acceleration) changes into light intensity changes. This article describes the following: