Preparation of TiO2 films by atmospheric radio frequency dielectric barrier discharge

来源 :2011年第三届微电子及等离子体技术国际会议 | 被引量 : 0次 | 上传用户:zhang444051115
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Titanium oxide (TiO2) has been widely used in variety of applications including photocatalysis,photovoltaics and self-cleaning.
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