Microwave Absorption Behavior of Transparent Al-Doped Hexagonal ZnO Nanofilms

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  Transparent Al-doped ZnO (AZO) conductive films was prepared a confocal dc-reactive magnetron sputtering using Zn and Al targets in Ar/O2 reactive atmospheres.The near-field radio-frequency (RF) noise absorption of the AZO films was investigated.After a standard short-open-load-through calibration, the near-field RF noise attenuation was measured using a RF microstrip test fixture suitable for quasi-transverse electromagnetic wave propagation.The RF noise absorption capability of AZO films is demonstrated to be up to 26% (4-6 GHz) in the AZO films with 5.9% Al.Surface proximity-induced loss is considered the dominating mechanism in the RF noise absorption of AZO films.
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